专利与文章 王 海容 教师个人主页
Yonghong Qi, Hailong Wang, Zongxiang Xie, Bo Li,Hairong Wang, and Xueyong We. Optical Interferometric MEMS Accelerometers[J]. Laser & Photonics Reviews, 2023: 23... 5.Tang Y K, Lai P, Hu Z, et al. A hard mask process and alignment device aims to achieve high consistency and mass-scale production of gas sensors based on spraying hy...